| 产品参数 | |
|---|---|
| Wafer Size | 4" diameter x 0.5mm |
| nsulating Layer | SiO2 |
| Si wafer Orientation | (100) + / - 0.5o |
| Diamond film thickness | 2 micron |
| Oxide Layer | 1 micron |
| Resistivity | <0.1 ohm-cm |
| Surface Roughness | as grown , RA < 10 nm |
| Package | One 1000 class clean room with 100 class plastic bag |
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